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The PV cell manufacturing process includes a number of hazardous materials, most of which are used to clean and purify the semiconductor surface. These chemicals, similar to those used in the general semiconductor industry, include hydrochloric acid, sulfuric acid, nitric acid, hydrogen fluoride.
Types of harm Solar Energy could cause to the Environment
http://www.ucsusa.org/clean_energy/our-energy-choices/renewable-energy/environmental-impacts-solar-power.h
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http://www.smartplanet.com/blog/intelligent-energy/breakthrough-worlds-most-efficient-solar-panel/12800
http://cedarcreekenergy.com/solar/