Decapsulation & Die Verification

Laboratory Process Guide 2023

DECAPSULATION & DIE VERIFICATION

Decapsulation

(Ash Oven)

Equipment: Thermofisher Muffle/Ash Oven

Destructive?: Yes

Duration: PR9 2-3hrs – AS6081 2-3hrs

Description: This is the second method of

Decapsulation with the same intended

outcome as chemical.

The device is put in a ceramic crucible and

then placed in an Ash Oven. The temperature is then raised to 500°c for 2 hours before it is cooled back down and the crucible is retrieved from the chamber.

After this process, the epoxy will have turned to a grey ash than can be sifted through to find the Silicon die completely freed of all surrounding material. It is cleaned with Acetone and stored in a box ready for Die Verification (see next page).

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