Laboratory Process Guide 2023

Scanning Electron Microscopy & Energy Dispersive Spectrometry (SEM/EDS)

Equipment: Hitachi TM4000+ or TM3000

Destructive?: Yes

Duration: PR9 30 mins – AS6081 1.5hrs

Description: ‘SEM’ and ‘EDS’ testing is a two-stage process of determining the legitimacy of the marked surface of a part.

The first step is SEM, the Lab Technician will inspect the surface at 5000x magnification for indications of alteration such as unidirectional abrasions, scratching or Silicon spheres (right side) appearing shattered.

EDS testing then provides a detailed map and data of the elements present in the surface. Carbon and Silicon are expected but the presence of elements such as Chlorine could indicate surface alteration.

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